Advantages of Pressure Sensor Based on the MEMS Technology

Leading Technology

The pressure sensor based on the MEMS (Micro Electronic Mechanical System) technology is a silicon strain gauge formed with “Wheatstone bridge” made on the monocrystal silicon wafer based on the micron/nanometer, and is featured with the advantages of high output sensibility, stable performance, reliable batch production, and good repeatability, etc.

Advanced Technique

The silicon strain foil is agglomerated on the 17-4PH stainless steel sensor elastomer through glass melting under the temperature over 500℃, and then the elastomer will be distorted and produce electric signals. The signals are amplified by the digital compensation amplification circuit with a micro-processor and fully-intelligent temperature compensation is provided via the digital software. Finally, standard signals are output. In the standard purified production course, the parameters are strictly controlled to prevent affection by the temperature, humidity and mechanical fatigue. The sensor is featured with the high frequency response and the wide working temperature, etc, so as to ensure its permanent stability when used in the severe industrial environment.

The intelligent digital temperature compensation classifies the temperature change into several small sections. The zero position and the compensation value of each section are written into the compensation circuit respectively. When used, these values are written into the temperature-affecting analog output path. Each temperature point is the “Calibration Temperature” of the transmitter.

Digital circuits of the sensor are carefully designed according to the radio frequency, electromagnetic interference and surge voltage working conditions, and are characterized with the high interference resistance, wide power supply scope and polar protection, etc.

Reliable Structure

The pressure chamber is made of imported 17-4PH stainless steel in the integrated way without O-rings or welding seams, free of leakage troubles. The overload capacity of the sensor is 200%FS and the destructive pressure is 500%FS, so the sensor affords the high-pressure overload. A damp protection device is installed inside the sensor to prevent possible transient pressure change in the hydraulic system and effectively resist the transient pressure impact.